| Component | Sulfur Dioxide |
| Model | APSA-370 (High sensitivity model) |
| Principle | UV Fluorescence method |
| Range | 0 - 10 / 20 / 50 / 100 ppb |
| Lower detection limit (LDL) *Typical value under certain conditions | 0.1 ppb |
| Response time (T90) | Within 5 minutes from the analyzer sample inlet |
| Displayed components | Instantaneous value of SO2 |
| Analog output | 4 - 20 mA DC or 0 - 1 V DC |
| Communication interface | RS-232C or TCP/IP |
| Sample gas flow | Approx. 0.7 L/min |
| Operation gas | N/A |
| Calibration gas | N2based SO2 diluted by pure air from SGGU-610 or by ultra-pure air from gas cylinder |
| Ambient temperature | Cleanroom temperature |
| Ambient humidity | Cleanroom humidity |
| Power | AC100 - 120 V, AC200 - 240 V |
| Power consumption | Approx. 150 VA in steady state |
| External dimensions | 430 (W) x 221 (H) x 650 (D) mm |
| Mass | Approx. 20 kg |
| Configuration (analyzer & calibration equipment) | APSA-370 (High sensitivity model) SGGU-610 |
SGGU-610: standard gas generator
