Wide range TMAH Concentration Monitor
Featuring a highly chemical-resistant 4-pole carbon sensor, allowing the measurement of TMAH concentration, the main component of photoresist developer solutions, over a wide range.
Wide-range compatibility
Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.
Automatic switching of display range
Automatically switches the display range from high to low concentration. Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.
Sensor with excellent chemical resistance
This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.
3 measurements
Capable of three types of measurements: TMAH concentration, conductivity, and temperature.
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics. It is particularly suitable for dilution management of low-concentration chemicals.
Indication Converter
| Model | HE-960H-TM |
|---|---|
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
Schematics
Do you have any questions or requests? Use this form to contact our specialists.
1.41 mS/cm Conductivity Standard Solution
12.9 mS/cm Conductivity Standard Solution
Conductivity Cell for Ultra Pure Water Measurement
Stand-alone Type Chemical Concentration Monitor
Fiber Optic Type Chemical Solution Concentration Monitor
Fiber Optic Type Chemical Concentration Monitor
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
High Precision, High Stability Chemical Concentration Monitor
Non-Contact Chemical Concentration Monitor
Washwater Monitoring System
Field-installation type water quality measuring instruments
Field-installation Type Fluoride Ion Concentration Meter
Field-installation type ammonia nitrogen meter
Field-installation Type Fluoride Ion Concentration Meter
Field-installation type dissolved oxygen meter (DO meter)
Field-installation type optical dissolved oxygen meter (DO meter)
Field-installation type dissolved oxygen meter (DO meter)
Panel-mount type dissolved oxygen meter (DO meter)
HF (Hydrofluoric Acid) DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor
Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing
Field-installation type water quality measuring instruments
Field-installation type dissolved oxygen meter (DO meter)
Field-installation type dissolved oxygen meter (DO meter)
Panel-mount type dissolved oxygen meter (DO meter)
HF (Hydrofluoric Acid) DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor
Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing
Field-installation type electric conductivity meter (conductivity meter)
Field-installation type electric conductivity meter
Field-installation type electric resistivity meter (resistivity meter)
Field-installation type electrical conductivity meter (conductivity meter)
Field-installation type electric resistivity meter (resistivity meter)
Panel-mount type conductivity meter (conductivity meter)
Carbon Sensor Conductivity Meter (Low concentration type)
Panel-mount type conductivity meter (conductivity meter)
Panel-mount type resistivity meter (resistivity meter)
Resistivity Meter for Semiconductor Cleaning Processes
Citric Acid Monitor
Panel-mount type 2-channel conductivity meter (conductivity meter)
KOH Monitor
High Precision TMAH Concentration Monitor
Carbon Sensor Conductivity Meter (High concentration type)
Panel-mount type conductivity meter
Carbon Sensor Conductivity Meter
Flat Carbon Sensor Conductivity Meter
Carbon Sensor Resistivity Meter
Panel-mount type 2-channel electric resistivity meter (resistivity meter)
2-Channel Resistivity Meter
Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide
HF / HCl Concentration Monitor
Low Concentration Type HF/HCl/NH3 Concentration Monitor
Field-installation type ORP meter
Field-installation type ORP meter
Panel-mount type ORP meter
Field-installation type polarographic residual chlorine meter
Field-installation type residual chlorine meter
Panel-mount type galvanic residual chlorine meter
On-line TOC analyzer
